From single to multiple point dispense, small or larger volume, solvent or developer needs.
Designed for photoresist applications utilizing multiple outputs/dispense pointsDetails
For solvent and developer applications with up to three independent dispense pointsDetails
Single point dispense for photoresist with variable rate and integrated controlsDetails
Designed for SOG to minimize defects caused by crystallization of the chemistryDetails
"Precision Stepper Motor" family of dispense systems
Near zero loss of chemical with integrated dispense detection and in-track repairDetails
For low viscosity photoresist applications
For mid-range viscosity fluids with variable rate and integrated controlsDetails
For high viscosity photoresist and polyimide applications
Since 1986, Teledyne Integrated Designs has been providing Chemical Delivery Solutions to both OEM and end user markets. All Chemical systems are custom built and designed to address their specific needs.
With turnkey solutions for Bulk Delivery Projects, everything from the Chemical Delivery Unit to smart VMB’s can be supplied.
Teledyne Integrated Designs can provide custom retrofits and upgrades to existing chemical management systems. This can be a cost effective choice for extending the life of existing dispense cabinets or bulk delivery systems.
Standalone bulk pumper
Bulk pumper with single drum storage system
Bulk pumper with dual drum storage system
Stand-alone temporary or permanent mobile supply carts for specialized chemical delivery
Acid, developer and slurry blending
Repairing and repurposing older equipment with up to date controls
Onsite Headcase replacement to bring new controls to old equipment
Local tool distribution of bulk supplied liquid chemicals (can be PLC controlled). T-Boxes and Pull Boxes are available
Point of use and/or remote delivery for photo processes
Provide a safe, automated means for process waste removal of resist, solvent, or corrosive liquids
Contact us for more information
We Solve Fluid Handling Problems and understand the importance of quality materials and purity in the manufacturing environment. We go to great lengths to guarantee the quality and design of our pumps.
Chemical management from the dock to the wafer… we can do it all.Details
Patented technologies for superior fluid handling solutions.Details
Manufacture Direct, servicing, repairs, rebuilds, and warranted equipment.Details
Refurbished inventory for shorter lead times.