- Batch Blending
- Blending smaller amounts and less waste
- Inline Blending
- Blending large amounts, some chemical goes to drain until established
- Point of Use Blending
||2.38 wt.% (~ 10:1)|
||0.1 to 5.0 wt.% (10:1 to 500:1)|
||1.5% to 2.0 wt.% (12:1 to 17:1)|
||1:1 to 50:1 dilutions|
||0.02 to 0.06 wt.% (~ 30:1)|
IDI can accommodate many different Metrology Sensors depending on the Accuracy required and best method to use per application.
|Metrology||Typical Applications||Relative Cost|
||HF, NH4OH, post-CMP cleans||Low|
||Slurries, post-CMP cleans||Low|
||TMAH, H2O2 in slurries||High|
All units can be configured to operate as stand-alone systems or together as one complete unit.
IDI believes in simple flow path enables consistent process performance also user-friendly controls also the customer to easily manage the system to adapt to their needs, all this results in a reliable unit using known components.
Slurry Blending is generally the same as Acid or Developer blending, with the exception of searing and separation.
IDI’s team of engineers know and understand how to keep slurry together and moving with custom software to keep the slurry suspended while being able to blend another batch, always staying on top of your chemical demands.