Accuracy
IDI can accommodate many different Metrology Sensors depending on the
Accuracy required and best method to use per application.
Metrology |
Typical Applications |
Relative Cost |
Conductivity |
HF, NH4OH, post-CMP cleans |
Low |
PH |
Slurries, post-CMP cleans |
Low |
Density |
Slurries |
Medium |
Refractometer |
H2O2 |
High |
Titration |
TMAH, H2O2 in slurries |
High
|