IDI Cybor Pumps Systems

M300 Pressure on Demand Dispense Unit

done_all Compare Pumps

The Model 300 Family of Integrated Dispense Systems provides automated control and monitoring of all critical process parameters. The units have no mechanical displacement and are designed to monitor and dispense all photolithography chemistries.

Photoresist is dispensed at a precise rate and can be delivered with swing-arm synchronization. Edge-bead remover (EBR) and developer are bubble-free and dispensed at a uniform flow-rate.

The dispense units integrate chemical source switching, liquid level detection and chemical dispensing into one unit. Flexibility in reservoir sizes allows the system to be adapted to a wide range of chemical dispensing applications.

The system uses digitally controlled Pulse Width Modulation to control process gas, and chemistry is displaced through a completely integrated filter.

Because there is only one moving part in the flow path, the systems are incredibly reliable and maintenance-free. The pressure “servo-loop” provides a consistent flow regardless of the number of open output valves and compensates for filter loading. The system will not allow itself to run out of chemistry, making it impossible to introduce air into the dispense lines.

The user-friendly controller can manage operations of up to four dispense units, and each dispense unit can operate up to three dispense points simultaneously. Chemistry is supplied to each unit from up to two sources, depending on user specification. The controller is capable of handling Model 300/310 units in any combination utilizing the same firmware.

The Controller

The controller offers a flexible software interface for specifying parameters and monitoring and controlling operations. All dispense parameters are digitally controlled and have an access-code protection system. Plus, the dispense units may be programmed while the process equipment is running.

Options include a serial communications card allowing communications with the connected process equipment, IDI ChemLink® or Bulk Pumping Systems. Utilization of the RS 232 communications port allows complete digital control over all parameters from a host computer.

CE Certified:


  • Exhaust routes chemical vapors into a compatible house exhaust system
  • Chemical reservoir automatically vented to exhaust if power fails
  • Battery backed RAM retains programmed data in the event of a power failure
  • All electronics isolated from Chemical vapors
  • Audible and visible alarms
  • Operates up to 4 dispense systems (12 dispense points)
  • Operates dispense systems in any combination or pressure range (M300/310)
  • Monitors Source and filter condition
  • Provides superior maintenance features
  • Simple equipment interface
  • In buffer can operation, the controller can notify the operator for refill, or control fully automated refill of the buffer tank
  • Controller provides a synchronization signal for swing arm operation
  • RS232, 422 and 485 communications option available
Class Description
Reliability MTBF > 1,000,000 dispenses
Repeatability 1-10 ml: < .01 1 sigma > 10 ml: =/- .1%
Dispense Volume 0.05-100cc M310 0.05-500cc 1 liter M310 0.05-1000cc (programmed in 0.01 sec. Increments)
Dispense Rate 1 cp= 25 cc/sec., 300 cp= 1 cc/sec* (programmed in .1 psi increments 0.25)
Differential Pressure 0-35 psi
Viscosity Range 1-300 cp
Filter Size .05, .1u or .2u 2”/4”
Controller Ambient, pressure or vacuum
N2 Regulated 70 psi @ .75 cfm
Size M300 5.5”W x 9.5”L x 12.5”H
M310 5.5”W x 9.5”L x 14.5”H

Related Pressure on Demand Pumps

M300

Designed for photoresist applications utilizing multiple outputs/dispense points

Details

M310

For solvent and developer applications with up to three independent dispense points

Details

M450

Single point dispense for photoresist with variable rate and integrated controls

Details

M550

Designed for SOG to minimize defects caused by crystallization of the chemistry

Details

Comparison: Pressure on Demand Pumps

Feature M300 M310 M450 M450 DV M550
Primary Chemicals Photoresist Solvent Developer Photoresist Photoresist SOG, FOX, SILK, DE
Viscosity Range 0-300 cps 0-300 cps 0-300 cps 0-100 cps 0-300 cps
Max Dispense Volume 425 ml 850 ml 75 ml 75 ml 75 ml
Drive Gas Nitrogen Nitrogen Nitrogen Nitrogen Helium/Argon
# of outputs Up to 3 Up to 3 1 1 1
On board Source Swathing Yes Yes No No No
Internal Reservoir Yes Yes Yes Yes Yes
Controller External Controller Required External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller Up to 4 pumps Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes Yes Yes Yes Yes
Dispense Detection No No No No No
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes Yes
Standard Line Size 1/4" input/output 1/4" input/output 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm

You might also be interested in Positive Displacement Pumps

Ocelot

Near zero loss of chemical with integrated dispense detection and in-track repair

Details

M5000

For low viscosity photoresist applications


Details

M7500

For mid-range viscosity fluids with variable rate and integrated controls

Details

HVP 610/650

For high viscosity photoresist and polyimide applications


Details

Comparison: Positive Displacement Pumps

Feature Ocelot M5000 M7000 M7500 M610 650
Primary Chemicals Photoresist Photoresist Photoresist Photoresist High Viscosity Photoresist & Polyimides
Viscosity Range 0-100 with DV/0-300 with Pneumatic Valve 0-3000 cps 0-300 cps 250-3000 cps 300-30,000 cps
Max Dispense Volume 6 ml (up to 11 ml for Prime Purge) 16 ml 16 ml 16 ml 20 ml & 45 ml
Drive Gas N/A N/A N/A N/A N/A
# of outputs 1 1 1 1 1
On board Source Swathing No No No No No
Internal Reservoir Yes No No No No
Controller On Board Controller requires PC to Connect External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller N/A Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes No No No yes
Dispense Detection Yes No No No Yes
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes For viscosities < 8000 cps
Standard Line Size 1/4", 4mm 1/4, 3/8 1/4, 3/8 1/4, 3/8 3/8, 1/2

IDI- Cybor