IDI Cybor M310 Pump

M310 Pressure on Demand Dispense Unit

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The IDI-M310 Series Pressure-On-Demand Pump, POD, technology pump provides automated dispense control for the develop, Edge Bead Removal, (EBR), and Solvent Pre-wet process.

The IDI-CYBOR patented POD provides bubble free, uniform flow rates that far exceed any results from a pressurized canister. The units have no mechanical displacement and are engineered to dispense a variety of photolithography chemicals.

3 Output Configs

The IDI-M310 pump is configurable with one to three outputs. The outputs can be operated sequentially or simultaneously.

Pulse Width Modulation

The IDI-M310 pump uses Pulse Width Modulation to control the pressurization of the driver gas that displaces the photo chemical. The pressure “servo loop” provides a constant photochemical flow regardless of the number of outputs valves open or filter loading. The pump system will not allow itself to run out of photo chemical making it impossible to introduce air into the dispense lines.

Control Operations

The user friendly controller can control operations of up to fours IDI-M300 pumps. Each M310 series pump can dispense up to three dispense points simultaneously. Chemistry is supplied to each M310 from up to two sources, depending on user specification. The controller offers a flexible software interface for specifying parameters and monitoring and controlling operations. All dispense parameters are digitally controlled and have access code protection.

Dispense System Features:

  • Only one moving part in the fluid path
  • Float style liquid level sensors ensure that the filter is not exposed to the driver gas
  • Point of use filtration
  • Auto Venting to prevent air bubble from entering the process lines and to reduce the effects of out gassing
  • Flare fittings on all fluid path connections
  • Purge Vent or Purge Back to source lines to reduce chemical waste
  • Independent drawback control valves provide a clean shut off and controllable shut off
  • Delta P servo loop pressure control compensates for filter loading
  • The all Teflon® fluid path is compatible with develops solvents and other photolithography chemicals
  • Photoresist specific Model 300 available. Operates up to fours IDI-M310 POD pumps
  • Operates up to 12 dispense points
  • Monitors Source and Filter conditions
  • Provides superior maintenance features
  • Simple equipment interface
  • RS232, 422, and 485 communications options

M310 Specifications:

Class Description
Reliability MTBF > 1,000,000 dispenses
Repeatability 1-10 ml: < .01 1 sigma > 10 ml: =/- .1%
Dispense Volume 0.05-100cc M310 0.05-500cc 1 liter M310 0.05-1000cc (programmed in 0.01 sec. Increments)
Dispense Rate 1 cp= 25 cc/sec., 300 cp= 1 cc/sec* (programmed in .1 psi increments 0.25)
Differential Pressure 0-35 psi
Viscosity Range 1-300 cp
Filter Size .05, .1u or .2u 2”/4”
Controller Ambient, pressure or vacuum
N2 Regulated 70 psi @ .75 cfm
Size M300 5.5”W x 9.5”L x 12.5”H
M310 5.5”W x 9.5”L x 14.5”H

Related Pressure on Demand Pumps

M300

Designed for photoresist applications utilizing multiple outputs/dispense points

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M310

For solvent and developer applications with up to three independent dispense points

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M450

Single point dispense for photoresist with variable rate and integrated controls

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M550

Designed for SOG to minimize defects caused by crystallization of the chemistry

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Comparison: Pressure on Demand Pumps

Feature M300 M310 M450 M450 DV M550
Primary Chemicals Photoresist Solvent Developer Photoresist Photoresist SOG, FOX, SILK, DE
Viscosity Range 0-300 cps 0-300 cps 0-300 cps 0-100 cps 0-300 cps
Max Dispense Volume 425 ml 850 ml 75 ml 75 ml 75 ml
Drive Gas Nitrogen Nitrogen Nitrogen Nitrogen Helium/Argon
# of outputs Up to 3 Up to 3 1 1 1
On board Source Swathing Yes Yes No No No
Internal Reservoir Yes Yes Yes Yes Yes
Controller External Controller Required External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller Up to 4 pumps Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes Yes Yes Yes Yes
Dispense Detection No No No No No
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes Yes
Standard Line Size 1/4" input/output 1/4" input/output 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm

You might also be interested in Positive Displacement Pumps

Ocelot

Near zero loss of chemical with integrated dispense detection and in-track repair

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M5000

For low viscosity photoresist applications


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M7500

For mid-range viscosity fluids with variable rate and integrated controls

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HVP 610/650

For high viscosity photoresist and polyimide applications


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Comparison: Positive Displacement Pumps

Feature Ocelot M5000 M7000 M7500 M610 650
Primary Chemicals Photoresist Photoresist Photoresist Photoresist High Viscosity Photoresist & Polyimides
Viscosity Range 0-100 with DV/0-300 with Pneumatic Valve 0-3000 cps 0-300 cps 250-3000 cps 300-30,000 cps
Max Dispense Volume 6 ml (up to 11 ml for Prime Purge) 16 ml 16 ml 16 ml 20 ml & 45 ml
Drive Gas N/A N/A N/A N/A N/A
# of outputs 1 1 1 1 1
On board Source Swathing No No No No No
Internal Reservoir Yes No No No No
Controller On Board Controller requires PC to Connect External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller N/A Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes No No No yes
Dispense Detection Yes No No No Yes
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes For viscosities < 8000 cps
Standard Line Size 1/4", 4mm 1/4, 3/8 1/4, 3/8 1/4, 3/8 3/8, 1/2

IDI- Cybor