IDI Cybor M450 Pump

M450 Pressure on Demand Dispense Unit

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Using IDI-CYBOR’s patented Pressure-On-Demand, POD, technology, the M450 pump provides superior dispense control for troublesome fluids such as anti-reflective coatings, ARC, BARC, TARC.

The troublesome foaming and mirco bubbling is eliminated.

Unique Design

The unique design of the M450’s reservoir with its top fill and bottom extraction design allows the natural separation of entrapped air bubbles. This natural separation is further enhanced by the M450 ability to be programmed to rest at idle mode with a user selectable pressure or vacuum setting. This idle mode setting can be set to further decrease the amount of foaming. The yield is a Micro-Bubble free dispense.

Reliability

The M450 meets your demands for reliability. No other pump in the industry is virtually maintenance free as the IDI M450 POD pump. The superior designs of the M450 pump allows for simple and clean operation. The fluid path of the M450 pump is injection molded PFA Teflon® with virtually moving parts.

Control Process

The IDI M450 pump requires no external controller for daily operations. The on board pump control card provides the necessary pump controls and process tool interface functions. The M450 is easily programmed with the patented ChemLink software. A single simple connection of the 9 pin serial connector allows remote programming from your desk top or at the host tool with a laptop computer.

Programming

The free ChemNet software is Windows-based for user friendly programming and maintenance. Simple fill-in-the-box allows for quick and error-free recipes. The variable rate dispense is programmed easily in pressure and time. Test and maintenance functions are setup and executed from the ChemNet maintenance program.

Flexibility

The IDI-M450 pumps flexibility allows use with other photo chemicals up to 100 cP in viscosity. Integrated support for Now Technologies PNP Smart Probe™ meets the process protection required in many of today’s fabs. The host tool interface selection is user selectable using the ChemNet software.

Features:

  • Calibration free ultrasonic liquid level sensing
  • Variable rate dispense
  • Redundant overfill protection
  • Drain to Source / Drain to output Modes
  • Auto Drain Shutoff
  • Source empty monitoring
  • Adjustable drawback
  • PFA Molded Reservoir and Valves
  • Pillar fittings in 1/8”, 3/16”, 1⁄4” 4mm and 6mm field selectable sizes
  • Two footprints sizes for optimum space usage
  • Auto Vent - Auto Purge filter functions

M450 Specifications:

Class Description
Dispense Volume Range 0.1 -50 mL
Volume repeatability <.01 mL STD DEV
Viscosity Range 1.0 -100 cP
Maximum Differential Pressure 30 PSI
Dispense pressure range 0.1 to 15 psi (std) 25 psi optional
Dispense Mode Constant or variable pressure
Dispense Filtration rate 0.1 to 20 mL / sec
Idle Mode Ambient, pressure or vacuum
N2 Drawback Volume Manually adjustable
Drawback Rate Manually Adjustable
Purge volume 0.1 - 50mL
Filter Type PALL, Mykrolis, Parker
Filter Size 2.5” / 16 Stack
Input Voltage 24VDC - 500mA (12 W max)
N2 Pressure (1/4” Line) Regulated 70- 80 psi @ 0.75 SCFM
Exhaust (1/8” Line) 0.75 SCFM
Orings Perfl uoroelastomer
Certifications CE

Related Pressure on Demand Pumps

M300

Designed for photoresist applications utilizing multiple outputs/dispense points

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M310

For solvent and developer applications with up to three independent dispense points

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M450

Single point dispense for photoresist with variable rate and integrated controls

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M550

Designed for SOG to minimize defects caused by crystallization of the chemistry

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Comparison: Pressure on Demand Pumps

Feature M300 M310 M450 M450 DV M550
Primary Chemicals Photoresist Solvent Developer Photoresist Photoresist SOG, FOX, SILK, DE
Viscosity Range 0-300 cps 0-300 cps 0-300 cps 0-100 cps 0-300 cps
Max Dispense Volume 425 ml 850 ml 75 ml 75 ml 75 ml
Drive Gas Nitrogen Nitrogen Nitrogen Nitrogen Helium/Argon
# of outputs Up to 3 Up to 3 1 1 1
On board Source Swathing Yes Yes No No No
Internal Reservoir Yes Yes Yes Yes Yes
Controller External Controller Required External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller Up to 4 pumps Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes Yes Yes Yes Yes
Dispense Detection No No No No No
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes Yes
Standard Line Size 1/4" input/output 1/4" input/output 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm

You might also be interested in Positive Displacement Pumps

Ocelot

Near zero loss of chemical with integrated dispense detection and in-track repair

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M5000

For low viscosity photoresist applications


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M7500

For mid-range viscosity fluids with variable rate and integrated controls

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HVP 610/650

For high viscosity photoresist and polyimide applications


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Comparison: Positive Displacement Pumps

Feature Ocelot M5000 M7000 M7500 M610 650
Primary Chemicals Photoresist Photoresist Photoresist Photoresist High Viscosity Photoresist & Polyimides
Viscosity Range 0-100 with DV/0-300 with Pneumatic Valve 0-3000 cps 0-300 cps 250-3000 cps 300-30,000 cps
Max Dispense Volume 6 ml (up to 11 ml for Prime Purge) 16 ml 16 ml 16 ml 20 ml & 45 ml
Drive Gas N/A N/A N/A N/A N/A
# of outputs 1 1 1 1 1
On board Source Swathing No No No No No
Internal Reservoir Yes No No No No
Controller On Board Controller requires PC to Connect External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller N/A Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes No No No yes
Dispense Detection Yes No No No Yes
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes For viscosities < 8000 cps
Standard Line Size 1/4", 4mm 1/4, 3/8 1/4, 3/8 1/4, 3/8 3/8, 1/2

IDI- Cybor