IDI Cybor M5000 Pumps

M5000 Cybor M5000 Pump - Positive Displacement Technology

done_all Compare Pumps

The fully programmable, stepper motor driven, electrohydraulic, CYBORPUMP™ System provides the Accuracy, Repeatability , and Versatility required for the most demanding requirements in the Semiconductor and Substrate Processing Industries.

The Programmable Photoresist-Polyimide Pumps provide accurate and repeatable performance for viscosities from 1 cp to 20,000 cp.

Accurate and Repeatable

The Stepper Motor Drive System in combination with a Positive Displacement Hydraulic Coupling can provide repeatability of +/- 0.005 ml.

This accuracy is maintainable over hundreds of thousands of dispenses. One study by a customer shows a total range variation of 0.03 grams over 250,000 cycles.

Versatile

A variety of Stepper Motor configurations, along with complete digital control of all parameters, allows hardware and software design modifications to meet a variety of challenging dispensing applications.

Very low viscosity chemistries such as Deep UV Resist, and Anti-Reflective chemistries can be dispensed at high rates without the usual dripping and suckback problems.

Extremely high viscosity Polyimides can be dispensed, most of them through 1.0 micron filtering. Dosing profiles can be tailored to fit a variety of approaches to Reduced Resist Consumption.

Reliable

Accelerated life testing has demonstrated that the pumps are capable of cycling over 1,000,000 times. This would mean that the Mean Time Between Maintenance could conservatively be established at every 600,000 cycles.

Minimum Facilitation & Maintenance Costs

Installation and start-up, either as a retrofit to an existing system or into a new system, is quick and easy. Comprehensive Interface Options, including RS232/RS422, are adaptable to a myriad of systems.

All dispense operations are Programmable. No mechanical adjustments are required. The Menu driven recipes are re-programmable in less than 30 sec. Each pump can be run with up to 8 independent recipes.

System Features:

  • Patented Stepper motor driven, electrohydraulic, positive-displacement pump system
  • Accurate, Repeatable, Reliable dispense
  • All wetted surfaces are Teflon
  • Accepts both Mykrolis and Pall fi lter elements
  • All Programming via front panel control
  • No mechanical adjustments, or vacuum required
  • Easy to retrofi t, or to install in to new systems
  • Auto Air vent valve (optional)
  • Recirculation/Purge valve (optional)
  • RS232/RS422 (optional)
  • Pressure Sensing
  • Filter Change Alarm (optional)
  • Viscosity range from 0.8 to 20,000 cP
  • Enhance dispense control with Variable Rate dispense and step to step Acceleration/ Deceleration
  • Options:
  • Source Reservoir
  • Source Swithcing

System downtime can be minimized by having one spare Control Module and Power Supply control up to 30 pumps. If one pump is down for maintenance, the other pumps can still be in operation.

A World Wide fully trained Service Group is available to facilitate installation, start up and support as required.

Major System Components:


  • Model 5120 All-Tefl on 10 ml. Pump
  • Model 5126 All-Tefl on 16 ml. Pump
  • Model 511 Filter System
  • Model 505, 507, 525, 527
    • Universal Pump Control Module
    • Controls up to 4 pumps
    • Stores up to 8 independent recipes per pump
    • Comprehensive interface options
    Choose from five sizes to meet the volume requirement
  • Model 5026, 16mL Pump, The Industry Standard
  • Model 5020, 10 mL Pump
  • Model 5024, 24mL Pump
  • Model 5066, 60 mL Pump
  • Model 5300, 100 mL Pump
  • Model 512 Power Supply for 18VDC operation

The Model 511 filter assembly offers eight filter configurations to meet critical filtration needs. From the low volume 4 stacks filter to high flow 5” filters, and two disposable capsule styles.

Related: Positive Displacement Pumps

Ocelot

Near zero loss of chemical with integrated dispense detection and in-track repair

Details

M5000

For low viscosity photoresist applications


Details

M7500

For mid-range viscosity fluids with variable rate and integrated controls

Details

HVP 610/650

For high viscosity photoresist and polyimide applications


Details

Comparison: Positive Displacement Pumps

Feature Ocelot M5000 M7000 M7500 M610 650
Primary Chemicals Photoresist Photoresist Photoresist Photoresist High Viscosity Photoresist & Polyimides
Viscosity Range 0-100 with DV/0-300 with Pneumatic Valve 0-3000 cps 0-300 cps 250-3000 cps 300-30,000 cps
Max Dispense Volume 6 ml (up to 11 ml for Prime Purge) 16 ml 16 ml 16 ml 20 ml & 45 ml
Drive Gas N/A N/A N/A N/A N/A
# of outputs 1 1 1 1 1
On board Source Swathing No No No No No
Internal Reservoir Yes No No No No
Controller On Board Controller requires PC to Connect External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller N/A Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes No No No yes
Dispense Detection Yes No No No Yes
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes For viscosities < 8000 cps
Standard Line Size 1/4", 4mm 1/4, 3/8 1/4, 3/8 1/4, 3/8 3/8, 1/2

You may also be interested in Pressure on Demand Pumps

M300

Designed for photoresist applications utilizing multiple outputs/dispense points

Details

M310

For solvent and developer applications with up to three independent dispense points

Details

M450

Single point dispense for photoresist with variable rate and integrated controls

Details

M550

Designed for SOG to minimize defects caused by crystallization of the chemistry

Details

Comparison: Pressure on Demand Pumps

Feature M300 M310 M450 M450 DV M550
Primary Chemicals Photoresist Solvent Developer Photoresist Photoresist SOG, FOX, SILK, DE
Viscosity Range 0-300 cps 0-300 cps 0-300 cps 0-100 cps 0-300 cps
Max Dispense Volume 425 ml 850 ml 75 ml 75 ml 75 ml
Drive Gas Nitrogen Nitrogen Nitrogen Nitrogen Helium Argon
# of outputs Up to 3 Up to 3 1 1 1
On board Source Swathing Yes Yes No No No
Internal Reservoir Yes Yes Yes Yes Yes
Controller External Controller Required External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller Up to 4 pumps Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes Yes Yes Yes Yes
Dispense Detection No No No No No
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes Yes
Standard Line Size 1/4" input/output 1/4" input/output 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm

IDI- Cybor