IDI Cybor M550 Pumps

M550 Pressure on Demand Dispense Unit

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For nearly a decade, IDI-CYBOR has been the leaders in innovative chemical dispense solutions. Based upon the field proven Pressure-On-Demand Technology, IDI-CYBOR introduces the M550 chemical dispense system for Spin on Glass (SOG) and Low K Dielectric applications.

Using IDI’s patented pressure on demand (POD) technology, the M550 provides superior particle reduction; dispense accuracy, chemical minimization characterization, and high reliability in a compact design. With an MTBF of over 1 million dispenses with no schedule maintenance, IDI is continuing to lead the industry in quality and superior technology.

Pressure on Demand using Helium

  • Helium pressure on demand (POD) is utilized to push the chemical through the system out on to the wafer
  • Through the manipulation of time and pressure, extremely accurate dispense volumes are achieved
  • Using POD, chemicals themselves are not subjected to any sort of mechanical forces

Superior Particle Reduction

Many of today’s SOG and Low K chemical dispense systems for lithography track systems simply use a regulated pressurize vessel to dispense SOG and Low K chemicals onto the wafer.

This strategy promotes the crystallization of SOG and particles within the pressurized vessel and throughout the dispense lines. By using the M550, IDI customers have dramatically reduced particles and surface defects by virtually eliminating the possibility of SOG crystallization.

Reduction in Chemical

By utilizing the variable rate dispense capability of the M550, a dramatic reduction of chemical can be realized. Variable rate offers four different dispense rates per recipe.

Easy Integration

The standard Model 550 will easily integrate with most track systems for greater flexibility. We’ve worked to create a system that is flexible and accommodating to a wide range of tubing and standard industry filters.

Built-In Reliability

The M550 meets your demands and requirements for reliability. Our dedication to being the best shows through the M550’s superior features:

  • Precise variable rate chemical dispense every time
  • Virtually no moving parts to break down
  • CE certified
  • Micro-bubble free dispenses
  • Lower chemical consumption during filter change out
  • Multiple footprints to optimize space utilization

Flexibility

The M550 has the integrated support of Now Technologies PNP SmartProbe™ to meet the process protection needs of the fab. This chemical dispense system is controlled by sophisticated electronics that are driven by detailed, user friendly software for easier integration with process equipment.

Features:

  • Helium Manifold
  • Calibration free ultrasonic liquid level sensor
  • Variable rate dispense
  • Redundant overfi ll sensor
  • Auto shut off from drain mode
  • RS232/RS485 communications to host computer
  • Source monitoring
  • Adjustable suckback
  • Windows 95/98/NT software program
  • PFA injection molded Tefl on blocks and valves
  • Delta P fi lter change alarm indicator provides optimum fi lter usage
  • Ability to use multiple size tubing with a simple fi tting change (3/6, 1/8, 1⁄4, 4mm, 6mm)
  • Multiple recipe select capability
  • Integrated support of Now Technologies PNP SmartProbeTM
  • On board controller
  • Two footprints to choose from (Model 550 and Model 550VT) for optimum space usage
  • CE certifi ed
  • True point-of-use fi ltration
  • Auto vent/Auto purge function
  • All Tefl on fl uid path
  • Source switching option for the 550VT

M550 Specifications:

Class Description
Dispense Volume Range 0.1 20 ml/sec*
Volume repeatability Standard Deviation < .01 ml for .1 to 6 ml
Viscosity Range 1-100 cP
Maximum Differential Pressure 30 psi minus the dispense pre
Dispense pressure range 0.1 15 psi
Dispense Mode Constant or variable rate
Dispense Filtration rate 0.1 20ml/sec*
Idle Mode
Drawback Volume Adjustable through suckback valve
Drawback Rate Manually Adjustable
Purge volume 0.1 50 ml*
Filter Type Pall or Millipore
Filter Size 2 inch
Input Voltage 24 VDC 500 ma (12 watts maximum)
N2 Pressure
Exhaust 0.75 cfm
Orings
Certifications CE
Size 550 10.9”W x 4.9”D x 8.0”H
550VT 6.6”W x 4.4”D x 12.2”H
Inlet Gas Type N2 and He
Inlet Gas Pressure Regulated 70 psi @ 0.75 cfm

Related Pressure on Demand Pumps

M300

Designed for photoresist applications utilizing multiple outputs/dispense points

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M310

For solvent and developer applications with up to three independent dispense points

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M450

Single point dispense for photoresist with variable rate and integrated controls

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M550

Designed for SOG to minimize defects caused by crystallization of the chemistry

Details

Comparison: Pressure on Demand Pumps

Feature M300 M310 M450 M450 DV M550
Primary Chemicals Photoresist Solvent Developer Photoresist Photoresist SOG, FOX, SILK, DE
Viscosity Range 0-300 cps 0-300 cps 0-300 cps 0-100 cps 0-300 cps
Max Dispense Volume 425 ml 850 ml 75 ml 75 ml 75 ml
Drive Gas Nitrogen Nitrogen Nitrogen Nitrogen Helium Argon
# of outputs Up to 3 Up to 3 1 1 1
On board Source Swathing Yes Yes No No No
Internal Reservoir Yes Yes Yes Yes Yes
Controller External Controller Required External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller Up to 4 pumps Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes Yes Yes Yes Yes
Dispense Detection No No No No No
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes Yes
Standard Line Size 1/4" input/output 1/4" input/output 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm

You might also be interested in Positive Displacement Pumps

Ocelot

Near zero loss of chemical with integrated dispense detection and in-track repair

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M5000

For low viscosity photoresist applications


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M7500

For mid-range viscosity fluids with variable rate and integrated controls

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HVP 610/650

For high viscosity photoresist and polyimide applications


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Comparison: Positive Displacement Pumps

Feature Ocelot M5000 M7000 M7500 M610 650
Primary Chemicals Photoresist Photoresist Photoresist Photoresist High Viscosity Photoresist & Polyimides
Viscosity Range 0-100 with DV/0-300 with Pneumatic Valve 0-3000 cps 0-300 cps 250-3000 cps 300-30,000 cps
Max Dispense Volume 6 ml (up to 11 ml for Prime Purge) 16 ml 16 ml 16 ml 20 ml & 45 ml
Drive Gas N/A N/A N/A N/A N/A
# of outputs 1 1 1 1 1
On board Source Swathing No No No No No
Internal Reservoir Yes No No No No
Controller On Board Controller requires PC to Connect External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller N/A Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes No No No yes
Dispense Detection Yes No No No Yes
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes For viscosities < 8000 cps
Standard Line Size 1/4", 4mm 1/4, 3/8 1/4, 3/8 1/4, 3/8 3/8, 1/2

IDI- Cybor