IDI Cybor M650 Pumps

Cybor M650 Pump
Positive Displacement Technology

done_all Compare Pumps

The Intelligent Pump for High Viscosity Dispense

Enhanced performance in a smaller footprint... The M650 now has a 17% smaller footprint with enhanced operational and programming capability. The M650 is designed to dispense high viscosity semiconductor processing chemicals from resist to polyimides to BCB’s as high as 50,000 cP.

The CYBOR M650 HVP combines stepper motor technology with state of the art hardware and software control technology to deliver a superior, repeatable high viscosity pump solution.

Software Control Technology

The CYBOR M650 uses patented software control technology to monitor and control the dispense operation. Enhancements in software allow for quick process tool interface selection.

With a simple icon selection the M650 pump auto configures the Trigger, Dispense/EOD, Ready, Error, and Warning signals. The M650 has expanded the on board recipe library. Now up to 8 recipes can be user selected thru discreet wiring or the RS232/485 communications.

What the M650 HVP can do that no other high viscosity pumps can do:

  • Dramatic reduction in time to prime and purge
  • Automatic setup with minimal operator intervention
  • Software feedback provides real time diagnostic information of the pump’s operation
  • SSED - Software Source Empty Detection
  • Significant reduction in waste during fluid change overs and PMs

Advanced Statistical Algorithms

Dual trigger capability allows for pre-dispense and process dispense volumes. Each can be individually programmed.

The patented advanced statistical algorithms can literally anticipates out of control conditions before they occur. After dispense volumes are “programmed” in the pump will automatically compensate for any changes in the pump’s mechanical operation, assuring a consistent, repeatable volume.

Benefits of Dependability

In addition, you’ll find the benefits of dependable, trouble-free operation. CYBOR’s modular design of the M650 allows for the quick and easy separation of the entire pump chamber assembly from the mechanical portion of the pump. Efficient maintenance can be performed without breaking into the fluid path of the pump, thus eliminating the risk of introducing air into the lines.

Using the Model 650 HVP ensures that you’ll be using the most well designed and technologically advanced high viscosity dispense unit in the industry.

Features:

  • Variable Rate Dispense
  • Teflon enclosed seamless diaphragm pump chamber eliminates the need for hydraulic fluid and O-rings, reducing the possibility of contamination due to wear of moving parts
  • Patent pending technology
  • QuickPurge & QuickPrime features
  • Straightforward design with a minimal number of fittings
  • All Teflon fluid path
  • Built-in leak detection
  • CE certified
  • Multiple recipe select capability

Pre configured Interface Modes

  • IDI Mode
  • SVG 8X
  • SVG 9X
  • TEL ACT 12 & 8
  • FSI

Eight recipes selection capability

  • Discreet Wire Selection
  • RS232 /485 Selection

3 valves configurations:

  • 3/8” output x 1⁄2” Input
  • 3/8” output x 3/8” input
  • 1⁄2” output x 1⁄2” input
  • Programmable suckback
  • SSED - Software Source Empty Detection
  • Optional filtration system
  • Software feedback of real time diagnostic information
  • Automatic setup
  • On-board controller
  • RS232/RS485 communications to host computer
  • Windows/Windows NT software
  • Programmable auto vent

M650 Specifications:

Class Description
Dispense Volume Range 0.1-20 ml
Dispense Volume Repeatability <0.1 ml (at 3
Dispense Rate 0.01-10 ml/sec*
Viscosity Range 50,000cP (500P)
Dispense Pressure Range Up to 190 psi
Re-circulation Programmable (<= 20 ml)
Dispense Mode Constant or variable rate
Suckback Volume 0.1-10 ml
Purge Volume 60 ml
Purge Time (average)* < 2 hrs
MTBF >1,000,000 dispense
MTTR < 2 hrs
Certification CE
Input Voltage 24 VDC, 5A Maximum
Inlet Gas Type Nitrogen or CDA
Exhaust 0.75 cfm
Fluid Path All Teflon
Chemical Compatibility Polyimides, Solvents, Resists
Size: 0.5” version
Size: 0.375” version
15.25”L x 5.46”W x 8.56”H
15.25”L x 5.46”W x 7.5”H
Filter Option Pall or Millipore (5”/40 stack)

Related: Positive Displacement Pumps

Ocelot

Near zero loss of chemical with integrated dispense detection and in-track repair

Details

M5000

For low viscosity photoresist applications


Details

M7500

For mid-range viscosity fluids with variable rate and integrated controls

Details

HVP 610/650

For high viscosity photoresist and polyimide applications


Details

Comparison: Positive Displacement Pumps

Feature Ocelot M5000 M7000 M7500 M610 650
Primary Chemicals Photoresist Photoresist Photoresist Photoresist High Viscosity Photoresist & Polyimides
Viscosity Range 0-100 with DV/0-300 with Pneumatic Valve 0-3000 cps 0-300 cps 250-3000 cps 300-30,000 cps
Max Dispense Volume 6 ml (up to 11 ml for Prime Purge) 16 ml 16 ml 16 ml 20 ml & 45 ml
Drive Gas N/A N/A N/A N/A N/A
# of outputs 1 1 1 1 1
On board Source Swathing No No No No No
Internal Reservoir Yes No No No No
Controller On Board Controller requires PC to Connect External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller N/A Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes No No No yes
Dispense Detection Yes No No No Yes
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes For viscosities < 8000 cps
Standard Line Size 1/4", 4mm 1/4, 3/8 1/4, 3/8 1/4, 3/8 3/8, 1/2

You may also be interested in Pressure on Demand Pumps

M300

Designed for photoresist applications utilizing multiple outputs/dispense points

Details

M310

For solvent and developer applications with up to three independent dispense points

Details

M450

Single point dispense for photoresist with variable rate and integrated controls

Details

M550

Designed for SOG to minimize defects caused by crystallization of the chemistry

Details

Comparison: Pressure on Demand Pumps

Feature M300 M310 M450 M450 DV M550
Primary Chemicals Photoresist Solvent Developer Photoresist Photoresist SOG, FOX, SILK, DE
Viscosity Range 0-300 cps 0-300 cps 0-300 cps 0-100 cps 0-300 cps
Max Dispense Volume 425 ml 850 ml 75 ml 75 ml 75 ml
Drive Gas Nitrogen Nitrogen Nitrogen Nitrogen Helium Argon
# of outputs Up to 3 Up to 3 1 1 1
On board Source Swathing Yes Yes No No No
Internal Reservoir Yes Yes Yes Yes Yes
Controller External Controller Required External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller Up to 4 pumps Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes Yes Yes Yes Yes
Dispense Detection No No No No No
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes Yes
Standard Line Size 1/4" input/output 1/4" input/output 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm

IDI- Cybor