IDI Cybor M7500 Pumps

Cybor M7500 Pump
Positive Displacement Technology

done_all Compare Pumps

The next step in Positive Displacement Technology

The CYBOR M7500 has taken the semiconductor industry’s most widely used and trusted pump and has further enhanced its control, and versatility.

Accuracy

The M7500 pump has enhanced volume accuracy and repeatability with new high resolution stepper motor control software. Volume repeatability is now up to 0.01mL. The user-selectable variable rate recipe has been demonstrated to reduce the volume of resist used.

Mid-Range Viscosity

The M7500 excels in mid-range viscosity, low volume dispense control. The dispense rate acceleration and deceleration is easily configured to minimize fluid instability (water hammer) at the critical end of the dispense. The acceleration / deceleration when applied between steps of the variable rate provide a predictable and smooth transition between rates.

Reduce Costs

The M7500 pump is configured with an on-board single pump controller. This new approach allows a reduced cost-per-dispense point. The on-board single pump controller is compatible with the industry standard CYBOR control architecture. Pump control is executed through the host process tool using discrete signals or RS232 / 485 serial communications.

Independent Programming

Eight recipes, each with independently programmable volumes and rates are programmable in milliliters and seconds. Active recipe selections are made through either communication protocol or discrete signals.

Standard Features:

  • All Teflon® Chemical Flow path
  • EPR O-rings
  • HP, High Performance Stepper Motor
  • 3/8” Flare Fittings
  • N2 purge of electronics
  • 24VDC Operation
  • On Board Controller
  • Factory installed Interface Cables

Available Track Interfaces

  • SVG86/88 (Rite Track)
  • SVG90, 90S
  • TEL Mark Vz, 7, 8
  • TEL ACT 8 & 12
  • FSI Polaris
  • DNS 60A, 80B, ETC.

Nowpak Smart Probe Interface

  • Single source

The M7500 CYBOR pump is configured for use with popular MEMS, packaging and bump technology photochemicals.

Upgrades / Options:

High Purity Pump Version

  • Standard w/ Kalrez Orings
  • Non Pipe thread Flow path

SOURCE LINE BUBBLE DETECTION SENSOR

FLUID RECIRCULATION VALVE (Stand alone version)

  • Can be used for Purge to Source or Purge to drain operations

M7500 Specifications:

Class Description Increments
Dispense Volume 0.01 to 16.0 mL 0.01 increments
Dispense Rate 0.01 to 3.0 mL/ sec 0.01 increments
Drawback Volume 0.100 to 8.000 mL 0.001 increments
Drawback Rate 0.01 to 3.0 mL/ sec 0.01 increments
Recharge Rate 0.01 to 3.0 mL/ sec 0.01 increments
Accuracy +/- 5% pre calibration offset
Repeatability 0.01 3 Sigma
Viscosity Range 100 to 3000 cp
Physical Dimension and Requirements Foot Print: 6”W x 8.8” D x 11”H
Power requirements 24 V 3 Amps
N2 60 psi at 5 SCFH (For N2 Purge Option Only)
Environmental 10°C to 40°C
Relative Humidity 10 to 90%, Non condensing
CE Certified

Related: Positive Displacement Pumps

Ocelot

Near zero loss of chemical with integrated dispense detection and in-track repair

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M5000

For low viscosity photoresist applications


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M7500

For mid-range viscosity fluids with variable rate and integrated controls

Details

HVP 610/650

For high viscosity photoresist and polyimide applications


Details

Comparison: Positive Displacement Pumps

Feature Ocelot M5000 M7000 M7500 M610 650
Primary Chemicals Photoresist Photoresist Photoresist Photoresist High Viscosity Photoresist & Polyimides
Viscosity Range 0-100 with DV/0-300 with Pneumatic Valve 0-3000 cps 0-300 cps 250-3000 cps 300-30,000 cps
Max Dispense Volume 6 ml (up to 11 ml for Prime Purge) 16 ml 16 ml 16 ml 20 ml & 45 ml
Drive Gas N/A N/A N/A N/A N/A
# of outputs 1 1 1 1 1
On board Source Swathing No No No No No
Internal Reservoir Yes No No No No
Controller On Board Controller requires PC to Connect External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller N/A Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes No No No yes
Dispense Detection Yes No No No Yes
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes For viscosities < 8000 cps
Standard Line Size 1/4", 4mm 1/4, 3/8 1/4, 3/8 1/4, 3/8 3/8, 1/2

You may also be interested in Pressure on Demand Pumps

M300

Designed for photoresist applications utilizing multiple outputs/dispense points

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M310

For solvent and developer applications with up to three independent dispense points

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M450

Single point dispense for photoresist with variable rate and integrated controls

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M550

Designed for SOG to minimize defects caused by crystallization of the chemistry

Details

Comparison: Pressure on Demand Pumps

Feature M300 M310 M450 M450 DV M550
Primary Chemicals Photoresist Solvent Developer Photoresist Photoresist SOG, FOX, SILK, DE
Viscosity Range 0-300 cps 0-300 cps 0-300 cps 0-100 cps 0-300 cps
Max Dispense Volume 425 ml 850 ml 75 ml 75 ml 75 ml
Drive Gas Nitrogen Nitrogen Nitrogen Nitrogen Helium Argon
# of outputs Up to 3 Up to 3 1 1 1
On board Source Swathing Yes Yes No No No
Internal Reservoir Yes Yes Yes Yes Yes
Controller External Controller Required External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller Up to 4 pumps Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes Yes Yes Yes Yes
Dispense Detection No No No No No
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes Yes
Standard Line Size 1/4" input/output 1/4" input/output 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm

IDI- Cybor