IDI Cybor Ocelot Pump

Ocelot Pump
Positive Displacement Technology

done_all Compare Pumps

Highest ROI by minimizing:

  • Chemical waste - Near zero loss of fluid when stabilizing filters
  • Time to bring tool back online after startup, filter change, and/or repair
  • Process qualification complications
  • Costs associated with rework and scrap
  • Ease of Maintenance
  • Auto setup
  • In track repair
  • Dispense detection

Ocelot Specifications:

Class Description
Reliability MTBF > 1,000,000 Dispenses
Accuracy +/- 5% before calibration offset (new install)
Repeatability +/- 0.02 mL @ 3 sigma
Viscosity 0-100 cp with Digital Valve
0-300 cp w/Remote Pneumatic Valve
Dispense Volume 0.01 – 6.5 mL (programmable in 0.005 mL increments)
Dispense and Recharge Rates 0.01 - 3 mL/sec (programmable in 0.01 increments)
Maximum Dispense Pressure 50 psi
*Dimensions (pump only) 2.5”W x 10.1”H x 9.6”D
*Maintenance Area (with maintenance area for tubing/cables and motor change) 10”W x 15”H x 10”D
Power requirements 24 V 4 Amps
Dimensions (electronics only) 2.4”W x 9.0”H x 5.3”D
Maximum length of electronics cable 15 ft

Related: Positive Displacement Pumps

Ocelot

Near zero loss of chemical with integrated dispense detection and in-track repair

Details

M5000

For low viscosity photoresist applications


Details

M7500

For mid-range viscosity fluids with variable rate and integrated controls

Details

HVP 610/650

For high viscosity photoresist and polyimide applications


Details

Comparison: Positive Displacement Pumps

Feature Ocelot M5000 M7000 M7500 M610 650
Primary Chemicals Photoresist Photoresist Photoresist Photoresist High Viscosity Photoresist & Polyimides
Viscosity Range 0-100 with DV/0-300 with Pneumatic Valve 0-3000 cps 0-300 cps 250-3000 cps 300-30,000 cps
Max Dispense Volume 6 ml (up to 11 ml for Prime Purge) 16 ml 16 ml 16 ml 20 ml & 45 ml
Drive Gas N/A N/A N/A N/A N/A
# of outputs 1 1 1 1 1
On board Source Swathing No No No No No
Internal Reservoir Yes No No No No
Controller On Board Controller requires PC to Connect External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller N/A Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes No No No yes
Dispense Detection Yes No No No Yes
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes For viscosities < 8000 cps
Standard Line Size 1/4", 4mm 1/4, 3/8 1/4, 3/8 1/4, 3/8 3/8, 1/2

You may also be interested in Pressure on Demand Pumps

M300

Designed for photoresist applications utilizing multiple outputs/dispense points

Details

M310

For solvent and developer applications with up to three independent dispense points

Details

M450

Single point dispense for photoresist with variable rate and integrated controls

Details

M550

Designed for SOG to minimize defects caused by crystallization of the chemistry

Details

Comparison: Pressure on Demand Pumps

Feature M300 M310 M450 M450 DV M550
Primary Chemicals Photoresist Solvent Developer Photoresist Photoresist SOG, FOX, SILK, DE
Viscosity Range 0-300 cps 0-300 cps 0-300 cps 0-100 cps 0-300 cps
Max Dispense Volume 425 ml 850 ml 75 ml 75 ml 75 ml
Drive Gas Nitrogen Nitrogen Nitrogen Nitrogen Helium Argon
# of outputs Up to 3 Up to 3 1 1 1
On board Source Swathing Yes Yes No No No
Internal Reservoir Yes Yes Yes Yes Yes
Controller External Controller Required External Controller Required On Board Controller requires PC to Connect On Board Controller requires PC to Connect On Board Controller requires PC to Connect
External Controller Up to 4 pumps Up to 4 pumps N/A N/A N/A
Near Zero Loss (Prime Purge) Yes Yes Yes Yes Yes
Dispense Detection No No No No No
In Track Repair No No No No No
Multiple Filter Option Yes Yes Yes Yes Yes
Standard Line Size 1/4" input/output 1/4" input/output 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm 1/8, 3/16, 1/4, 4mm, 6mm

IDI- Cybor