Chemical Blending

Chemical Blending
Chemical Blending
Chemical Blending2
One year warranty
IDI-CMS

Chemical Blending

Acid Blending

  • High purity all PFA design, Some Options Include: Pillar, Primelock or SMC Insert fittings for a leak proof design

Developer Blending

  • Designed for a range of concentrations, different metrology (sensors) can be used to achieve the best accuracy for the specification

Slurry Blending

  • Targeted to meet different needs and provide the greatest tool reliability

Accuracy

IDI can accommodate many different Metrology Sensors depending on the Accuracy required and best method to use per application.

Metrology Typical Applications Relative Cost
Conductivity HF, NH4OH, post-CMP cleans Low
PH Slurries, post-CMP cleans Low
Density Slurries Medium
Refractometer H2O2 High
Titration TMAH, H2O2 in slurries High​

Commonly Blended Chemicals

TMAH2.38 wt.% (~ 10:1)
HF0.1 to 5.0 wt.% (10:1 to 500:1)
NH4OH 1.5% to 2.0 wt.% (12:1 to 17:1)
Post-CMP Cleans 1:1 to 50:1 dilutions
BTA 0.02 to 0.06 wt.% (~ 30:1)